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C, H, N and O in Si and characterization and simulation of materials and processes : proceedings of Symposium N on Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and other Elemental Semiconductors, and Symposium G on Atomic Scale Characterization and Simulation of Materials and Processes of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995

責任表示:
edited by A. Borghesi ... [et al.]
言語:
英語
出版情報:
Amsterdam ; New York : Elsevier, 1996
形態:
1 v. (various pagings) ; 29 cm
著者名:
シリーズ名:
European Materials Research Society symposia proceedings ; 56 <BA07004036>
ISBN:
9780444824134 [0444824138]
書誌ID:
BA32936818
フォーマット:
図書
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