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Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.

責任表示:
editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies
言語:
英語
出版情報:
Pittsburgh, Pa. : Materials Research Society, c1987
形態:
xvii, 485 p. ; 24 cm
著者名:
Wilson, Syd R. <DA01978718>
Powell, Ronald A. <DA00261897>
Davies, D. Eirug <DA0197873X>
Materials Research Society <DA00024949>
Materials Research Society. Meeting <DA00721013>
Symposium on "Rapid Thermal Processing of Electronic Materials" <DA03095794>
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シリーズ名:
Materials Research Society symposia proceedings ; v. 92 <BA00013775>
ISBN:
9780931837593 [0931837596]
書誌ID:
BA0147740X
フォーマット:
図書
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