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Journal of vacuum science and technology

責任表示:
American Vacuum Society
巻次(年次):
Vol. 1, no. 1 (1964)-v. 21, no. 4 (1982)
出版情報:
New York : American Institute of Physics
著者名:
American Vacuum Society <DA03926125>  
継続後誌:
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <AA10635106>
Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society <AA10635514>
言語:
英語
ISSN:
00225355
書誌ID:
AA00708677
フォーマット:
雑誌
子書誌情報
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